Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

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Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

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fabrication and optical characterization of silicon nanostructure arrays by laser interference lithography and metal-assisted chemical etching

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Department of Physics and Materials Scien Chee Avenue, Kowloon Tong, Kowloon, Hon Department of Biology and Chemistry, Cit Avenue, Kowloon Tong, Kowloon, Hong Kon Centre for Functional Photonics (CFP), Cit Avenue, Kowloon Tong, Kowloon, Hong Kon Shenzhen Research Institute, City Universit † Electronic supplementary informa 10.1039/c4ra06172a ‡ These authors contributed equally to th Cite this: ...

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ژورنال

عنوان ژورنال: Nanoscale Research Letters

سال: 2013

ISSN: 1556-276X

DOI: 10.1186/1556-276x-8-155